University of Calgary
PHI 690 Scanning Auger NanoProbe System & PHI VersaProbe 5000-XPS
The 690 Scanning Auger NanoProbe system & PHI VersaProbe 5000-XPS have finally arrived on campus! They are housed in the new Surface Science Lab located in the
690 Scanning Auger NanoProbe system
This state-of-the-art equipment allows for surface composition at
high spatial resolution:
- SEM Imaging: Provides highmaginification of the sample.
- Elemental Analysis: Determines what elements are present and how much.
- Elemental Imaging: Illustrates two-dimension elemental distribution
As well as sputter depth profiling:
- Reveals thin film and interfacial composition
PHI VersaProbe 5000-XPS
Unique taylor-made apparatus:
Flow through high pressure reactor
- High Pressure reaction up to 20 atm
- Low and high temperature capabilities : -100°C to 650°C
- High vacuum pumping system
- Possibility to attach gas analysis system
Preparation reactor
- Thermal Programmed Desorption capability
- Mass spectrometer up to 200 amu
Transfer system between apparatus and analysis chamber
Applications
Quantitative surface composition:
Surface modifications
Surface cleanliness
Process residue detection
Identify stains, defects, debris
Surface chemical state information:
Oxidation State (binding energy)
Structure/Orientation (valence band structure)
Oxidation State (binding energy)
Structure/Orientation (valence band structure)
Thin film analusis (sputter depth profiling)
Verify thin film construction
Locate contaminants